EE 531

Semiconductor Devices & Device Simulation
Physics and Modeling of Nanoscale VLSI Devices

Spring Quarter 2017
Tuesday and Thursday, 2:30-4:20pm
Room: MEB 234

Instructor: Scott Dunham

Office: EE 218
Phone: 543-2189
E-mail: dunham@ee.washington.edu
Office hours: TBA

• Online Discussion Board

  Please use the class GoPost Online Discussion Board for any questions about the class (e.g., lectures, homework, grading, etc.).

• Course Information (PDF)

• Course Syllabus (PDF)

• Announcements

  • Simulation Software (Sentaurus Device):

    The simulation software is available on the EE Linux cluster. For information on how to access the cluster and the software, visit the EE CAD TA Wiki: https://wiki.ee.washington.edu/index.php/Cad_TA. Do not print the manuals out. They are HUGE. You can make a copy to read on your local machine. To begin, read Getting Started section of Sentaurus-Device Manual. To run, type "sdevice commandfile" (commandfile is the file with commands telling simulator what to do) in directory with example files (you make your own copy to edit).You will likely have to either use the full path name or add location of executable to your path. If you are not familiar with Unix, you might want find an online Unix tutorial.

• Supplementary Reading (Reserve requested in ENG Library)

  • "Fundamentals of Carrier Transport," by Mark Lundstrom, 2000.
  • ``Advanced Semiconductor Fundamentals (Modular Series Vol. VI)'' by Pierret
  • ``Semiconductor Physics and Devices'' by Neamen
  • ``Device Electronics for Integrated Circuits'' by Muller and Kamins
  • ``Modern Semiconductor Device Physics,'' edited by Sze
  • ``Physics of Semiconductor Devices'' by Sze
  • ``Advanced Theory of Semiconductor Devices'' by Hess
  • ``Si Processing for the VLSI Era: Vol. 3---The Submicron MOSFET'' by Wolf
  • ``Advanced MOS Devices'' by Schroder
  • ``Operation and Modeling of the MOS Transistor'' by Tsividis

• Homework

  • Homework #1 (PDF)

  • Homework #1 Solutions (PDF)

  • Homework #2 (PDF)

  • Homework #2 Solutions (PDF)

  • Homework #3 (PDF)

  • Homework #3 Solutions (PDF)

  • Homework #4 (PDF)

  • Homework #4 Solutions (PDF)

• Homework from previous offering

  • Homework #5 (PDF)

  • Homework #5 Solutions (PDF)

  • Homework #6 (PDF)

  • Homework #6 Solutions (PDF)

  • Homework #7 (PDF)

  • Homework #7 Solutions (PDF)

• Handouts

  • Review of Semiconductor Device Equations (PDF)

  • Review of Quantum Mechanics (PDF)

  • Quantum Mechanics Basics from Pierret (PDF)

  • MOS Capacitor Basics (PDF)

  • Long Channel MOSFETs (PDF)

  • Notes on Linearized Drain Current Equation (PDF)

  • Fermi's Golden Rule from Lundstrom (PDF)

  • Nonstationary Device Modeling (PDF)

  • Carrier Scattering from Lundstrom (PDF)

  • WKB Approximation from Kroemer (PDF)

  • Lecture Notes from Purdue (Lundstrom) on Short Channel Effects (PDF)

  • Lecture Notes from Purdue (Lundstrom) on Velocity Saturation (PDF)

  • Lecture Notes from Purdue (Lundstrom) on Ballistic MOSFET (PDF)

  • Lecture Notes from Purdue (Lundstrom) on MOSFET Scattering Theory (PDF)

  • Lecture Notes from Purdue (Lundstrom) on Effective Mobility (PDF)

  • Lecture Notes from Purdue (Lundstrom) on VT Engineering (PDF)

  • Lecture Notes from Purdue (Lundstrom) on Series Resistance (PDF)

  • Lecture Notes from Purdue (Lundstrom) on MOSFET Leakage (PDF)

  • Lecture Notes from Purdue (Lundstrom) on Interconnect (PDF)

  • Lecture Notes from Purdue (Lundstrom) on Variability (PDF)

  • Lecture Notes from Purdue (Lundstrom) on CMOS Circuits (PDF)

  • Lecture Notes from Purdue (Lundstrom) on SOI Electrostatics (PDF)

  • Lecture Notes from Purdue (Lundstrom) on RF CMOS (PDF)

  • Lecture Notes from Purdue (Lundstrom) on Heterojunction FETs (PDF)

  • Constants and Parameters (PDF)

  • (Crude) Notes on Fully Depleted (Thin Body, Dual Gate, etc.) MOSFETs (PDF) (Please send any comments/corrections to GoPost.)

  • Projected Vdd, Vt, tox from Taur

• Notes from EE 482 (Prerequisite course)

  • Notes on Semiconductor Devices in Equilibrium (PDF)

  • Notes on Movement of Free Carriers (PDF)

  • Notes on Semiconductor Devices in Nonequilibrium (PDF)

  • Notes on PN Junctions (PDF)

  • Notes on Metal Semiconductor Junctions (PDF)

  • Notes on MOS Capacitors (PDF)

  • Notes on MOS Transistors (PDF)

  • Notes on Bipolar Junction Transistors (PDF)

• Links

  • Java Applets for Quantum Mechanics from Ecole Polytechnique

  • Java Applets for Semiconductor Education from SUNY Buffalo

  • Engineering/iSchool Writing Center (for assistance with project report)

• Exams

  • Exam 1 (PDF)

  • Previous Midterm (PDF)

  • Previous Midterm Solutions (PDF)

  • Exam 2 (PDF). 3rd problem was added.

  • Previous Final (PDF)

  • Previous Final Solutions (PDF)

• Project

  • Example Project (PDF)

  • Example Project (PDF)

  • Example Project (PDF)

  • Example Project (PDF)

  ---